Equipment Base

Ongoing Research Areas & Partners

Recent Research Papers

Useful Links

A Few Recreational Links


MRL is a Key Technology Laboratory within a new National Centre of Excellence called RINCE (pronounced 'rink-eh' with a hard 'c'). RINCE, the Research Institute for Network & Communications Engineering, is one of the Irish government's initiatives being funded under the Higher Education Authority's (HEA) Programme for Research in Third Level Institutions 1999-2001. RINCE is a national centre for excellence in information and communications technology. It is based in the School of Electronic Engineering at Dublin City University here in Ireland.

RINCE is currently offering exciting Postgraduate Research Opportunities in many different research areas. Please click on the RINCE link above for more information.


Director: Patrick J. McNally, BE, ScM, PhD, CPhys, MInstP, MIEI, MIEEE.

Established: 1993.

Current Human Resources: 1 University Lecturer, 3 PhD Students, 2 MEng Students, 4 BEng Students.

Key Outputs: Academic Publications & Papers; Industrial & academic collaboration in Ireland, France, Italy, Germany, Netherlands, U.S.A. and Finland; Ireland's only access to synchrotron X-ray topography characterisation. Student Training. Consultancy.


Further information from:

Dr. Patrick J. McNally

Director, Microelectronics Research Laboratory, School of Electronic Engineering, Dublin City University, Dublin 9, IRELAND.

email: mcnallyp@eeng.dcu.ie

Back to top

Equipment Base

Class 100 clean room facilities.

Karl Suss MJB300 mask aligner - sub micron photolithography.

Laurell photoresist spinner.

Plasma Technology plasma RIE etcher.

Scientific Systems Ltd. (Dublin 9, IRL) Plasma Impedance Monitor.

Metal deposition facilities: resistive thermal and e-beam.

Dielectric sputter etch facilities.

Refractory metal sputtering.

Graphite strip annealer.

Signetics probe station.

Curve tracers, spectrum analyzers, lock-in amplifiers etc.

ESCA and Auger Electron Spectroscopy facilities..

Sula Technologies Deep Level transient Spectroscopy (DLTS) system with Cold Stage.

Jobin-Yvon Modular Integrated Raman/Photoluminescence system (HeNe Laser with resolution down to 1 cm-1).

Photoacoustic Spectroscopy system utilising the gas chamber cell concept for sub-bandgap non-radiative de-excitation spectroscopy.

Access to synchrotron x-ray topography characterisation facilities at HASYLAB, Germany.

X-ray topography image processing facilities, incl. Zeiss optical microscope, CCD image capture and Visilog-based image enhancement and processing.

Sun workstations, Javastations and personal computers.

Electronic device simulation software (MEDICI) - homojunction and heterojunction devices.

Simulation of device processing (using Tsuprem4 and QuickField) especially process-induced stresses and their impact.

Back to top

Ongoing Research Areas and Partners

Current Partnerships

(1) HASYLAB-DESY (Hamburger Synchrotronstrahlungslabor am Deutsches Elektronen- Synchrotron), Hamburg, Germany: Provides high intensity synchrotron X-radiation facilities allowing MRL to perform state-of-the-art and novel materials/device processing characterisation.

(2) Optoelectronics Laboratory, Helsinki University of Technology, Finland: Collaboration on synchrotron x-ray topography (SXRT) analysis of materials/device processing (Prof. T. Tuomi)

(3) Kristallographisches Institut, University of Freiburg, Germany: Collaboration on a comparative analysis of advanced III-V (e.g GaAs, InP) earth- and space-grown materials, and implications for future device fabrication (Dr. A.N. Danilewsky).

(4) Plasma Ireland Ltd., Cork: Examination of failure mechanisms in packaged LEDs using x-ray topography, micro-Raman strain measurements, optical emission spectroscopy and I-V characterization.

(5) Intel Ireland Ltd., Leixlip, Ireland: Use of synchrotron x-ray topography and micro-Raman spectroscopy to monitor the stress-related impact of copper metallization process options for CMOS processes. Analysis of stress/defect production due to Pb-based flip-chip technologies.

(6) Physicalisch-Technische Bundesanstalt (PTB), Braunschweig, Germany: Use of x-ray topographic techniques to verify the crystalline quality of Si single crystals used in the Avogadro Project, which aims to redifine the KILOGRAMME using perfect Si, in order to allow worldwide laboratory-based replication of this international standard (in collaboration with Helsinki University of Technology).



Ongoing Research

Semiconductor Device(s) Processing

* Process induced defects/stresses;
* Synchrotron x-ray topography

Examples of two back-reflection synchrotron x-ray topographs of strain fields in a packaged IC . The red image is a blow-up of the strain fields/defect generation under the bonding pad (second from the top on the right hand side) of the packaged IC (blue image).


* Finite element/difference modelling


Semiconductor Device Modelling

* Advanced semiconductor devices
* Orientational & dimensional effects
* Analysis of the impact of stress on device characteristics


Recent simulation of process stress-induced (compressive overlayer stress=107 Pa)piezoelectric charge distrubution for a [01-1] AlGaAs/GaAs HBT. The impact of this charge is, in fact, extremely small (1997)


* Defects/Yield

Metal-Semiconductor Contact Technology

* Schottky barriers
* Ohmic contacts
* Metallisation techniques

Recent data for thermal stability of novel Pd/Sn-based Ohmic contacts to n-GaAs


* Theoretical modelling
* Materials characterization
* Spectroscopic techniques
Semiconductor Plasma Processing
* Industrial plasma control
* In-situ, real-time plasma diagnostics
* Plasma impedance monitoring
* Modelling of harmonic contributions to non-symmetrical rf plasmas

Recent measurements of the fundamental harmonic component of Plasma Impedance [Z(0)] for an SF6 RIE configuration plasma as a function of applied power (f=13.56 MHz)


Back to top

Recent Research Papers

Click HERE for details of recent research papers

Back to top

Useful Links

RINCE - Research Institute for Network & Communications Engineering

DCU School of Electronic Engineering

Institution of Engineeers of Ireland

The Institute of Physics

IEEE Home Page

The Institute of Materials (UK)

American Institute of Physics

TIPTOP: Welcome Page

ESRF header

DESY Welcome Page

Hamburger Synchrotronstrahlungslabor HASYLAB Homepage

SPring-8 Home Page

The World-Wide Web Virtual Library: Subject Catalogue

XXX Physics e-print archive

Atomic Scattering Factors

CORDIS Home Page

EUREKA Home Page

Forbairt Team

Semiconductor Process, Equipment and Materials Network

SEMI's Home Page

Virtual Cleanroom Project Home Page


Cornell Solid State Physics (LASSP) Home Page

 NIST Physics Laboratory

Back to top

A Few Recreational Links

Harmony Central:Guitar: Tablature

CNN Interactive

Irish Weather


Leonard Cohen

United Space Alliance

World Radio Network Online

LyricFM - Ireland National Classical Radio Station

BBC Radio 3 (UK) - Peerless Classical Music Station

Concertzender (Holland) - Eclectic Musical Mix

The Wine Development Board of Ireland


Back to top

Last Revised: 21 October 2002